Enhancement of Conversion Efficiency of Extreme Ultraviolet (EUV) Emission from a Laser-Produced Plasma by Use of Water Jet Target

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  • HIGASHIGUCHI Takeshi
    Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki
  • RAJYAGURU Chirag
    Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki
  • KOGA Masato
    Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki
  • SASAKI Wataru
    Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki
  • KUBODERA Shoichi
    Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki

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  • 水ジェットターゲットを用いたレーザー生成プラズマからの極端紫外光の高効率化
  • ミズ ジェットターゲット オ モチイタ レーザー セイセイ プラズマ カラ ノ キョクタン シガイコウ ノ コウコウリツカ

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Abstract

Extreme ultraviolet (EUV) radiation at the wavelength of around 13 nm was observed from a laser-produced plasma using continuous liquid water-jet. The EUV conversion efficiency (CE) was found to depend strongly on the laser focal spot size near the plasma expansion diameter. The maximum EUV CE was observed to be 0.38%/2π sr at 13.0nm in 2% bandwidth.

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