Study on the Field Evaporation in the Laser-assisted Three-dimensional Atom Probe Based on the Thermal Diffusivity

ASAKA Takahiro, TOMIYASU Bunbunoshin, MORITA Masato, TERAKAWA Tetsuo, OWARI Masanori

doi:10.2116/bunsekikagaku.63.809

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Other Title

レーザー補助三次元アトムプローブにおける熱拡散率に基づく電界蒸発機構に関する研究
レーザーホジョサンジゲンアトムプローブニオケルネツカクサンリツニモトズクデンカイジョウハツキコウニカンスルケンキュウ

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Under laser-assisted three-dimensional atom probe analyses, the delay time of field evaporation at the shadow-side of the laser was measured. The samples were three materials of different thermal diffusivity: Al, W and GaAs. The curvature radius of each tip-sample was estimated from the TEM image. The flight distances, depending on a detected position, were corrected based on the Pythagorean Theorem. After corrections, the flight times of the ions emitted at the laser-side and shadow-side were compared. The delay time of field evaporation was also observed in the measurement of an Al sample (high thermal diffusivity). The delay time of the sample with lower thermal diffusivity was longer. Concerning each sample, the quadratic curve was fitted to the relationship between the delay time and the detected position. We defined the thermal factor under laser-assisted field evaporation as the reciprocal of the coefficient of the quadratic curve. These thermal factors had a correlation to the thermal diffusivities. Thus, we concluded that the thermal factor defined in this study was an important factor under laser-assisted field evaporation.

Journal

BUNSEKI KAGAKU

BUNSEKI KAGAKU 63 (10), 809-815, 2014

The Japan Society for Analytical Chemistry

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