A Precision Displacement Measurement Using a Diffraction Grating

DOI Web Site

Bibliographic Information

Other Title
  • 回折格子を用いた精密変位検出法
  • カイセツ コウシ オ モチイタ セイミツ ヘンイ ケンシュツホウ

Search this article

Description

A new precision displacement measuring method using a diffraction grating was investigated. In this paper, the measuring principle and the experimental results are described. The measuring principle is based on an interference phenomenon. Interference fringes are produced by superposing of a pair of positive and negative order diffraction beams obtained by illuminating the grating perpendicularly with a monochromatic light beam. The displacement of the grating causes sinusoidal change in brightness of the fringes. The displacement measurement is carried out by counting the fringes photoelectronically. Experimental system was constructed by using a reflection grating with the period of 1.43 μm and a laser diode as the monochromatic light source. The measuring performance with the precision of 0.1 μm over the range of 20 mm was confirmed in the experiment. An application to two-dimensional displacement measurement is also proposed.

Journal

Keywords

Details 詳細情報について

Report a problem

Back to top