２ピッチ格子投影による３次元形状計測

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書誌事項

タイトル別名
  • Profile Measurement by Two-pitch Grating Projection.
  • 2 ピッチ コウシ トウエイ ニ ヨル 3ジゲン ケイジョウ ケイソク

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抄録

The surface profile is obtained by projecting grating pattern on the object surface and observing the deformed pattern at the direction different from the projection. Phase-shifting technique is generally used for measuring height distribution at all the picture elements over the object image. In this method, if the slope of the object surface is so steep that the phase change between any adjacent pixels is larger than, the integer fringe orders become ambiguous and the profile cannot be determined. In this paper, a new method for measuring steep slopes is proposed and verified by experiments. In the method, two gratings with different effective pitches P1 and P2 are projected on the object. By subtracting the two calculated heights for the two pitches, the integer fringe orders are obtained. Simulations clarified the effect of intensity quantization on the counting error of fringe order.

収録刊行物

  • 精密工学会誌

    精密工学会誌 58 (5), 877-882, 1992

    公益社団法人 精密工学会

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