Precision Table Control System by Friction Drive for Optical Disk Mastering Machine.

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  • 摩擦駆動を応用した光ディスク原盤露光装置用テーブル送り機構の開発
  • マサツ クドウ オ オウヨウシタ ヒカリ ディスク ゲンバン ロコウ ソウチヨ

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Abstract

The purpose of this paper is to present a design outline and describe the characteristics of the table control system of a high density optical disk mastering machine. The table control system consists of a friction drive, a double guide air-pressurized slider, a laser interferometer and a controller. Friction drive makes it possible to position the table with 10nm accuracy over 200 mm travel. The laser interferometer system is designed to measure the position of an optical head, exposure point, using the special laser optics configuration with two reflectors, between which the optical head is located. The table is positioned with a standard deviation of 2.9 nm (σ) in a ramp command of 10μm/s and the steady-state error and the settling time are better than 10 nm and 0.15 second, respectively, in 1μm step response. The mastering machine has made pits and grooves with a track pitch of 0.65 μm and a pit width of 0.3μm.

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