レーザ光の振動走査方式による表面粗さ測定法の開発 (第1報)

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書誌事項

タイトル別名
  • Development of Reflex Measurement on Surface Roughness by Scanning Vibration of Laser Beam (1st Report)
  • レーザ光の振動走査方式による表面粗さ測定法の開発(第1報)平坦表面粗さの測定
  • レーザコウ ノ シンドウ ソウサ ホウシキ ニヨル ヒョウメン アラサ ソクテ
  • Roughness Measurements of the Flat Surface
  • 平坦表面粗さの測定

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抄録

For measurement of the surface roughness, the techniques for simple treatment and proper evaluation of the measured results are generality required.In the measurement of the flat surface, the detection of diffuse reflex light is difficult because of the influence of the scattering light by finished scratch. Furthermore, the extent of roughness measurement is limited within narrow domain. Then the detection system of scattering light was investigated to be applicable between rough and smooth surface on the samples. By using the detection system of the moving surface for incident beam, the roughness measurement of the flat surface of the sample was examined by laser beam with new conpulsory vibration method. As a result, this method was found to he able to obtain the recording profiles of the effective treatment and proper evaluation.

収録刊行物

  • 精密工学会誌

    精密工学会誌 63 (3), 410-414, 1997

    公益社団法人 精密工学会

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