Development of Piezo-element Sensor for Touch Trigger Probe.
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- ISHIKAWA Nobuhiro
- (株)ミツトヨ
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- HIDAKA Kazuhiko
- (株)ミツトヨ
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- NISHIMURA Kunitoshi
- (株)ミツトヨ
Bibliographic Information
- Other Title
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- 三次元測定機用タッチ信号プローブのセンサ機構の開発
- 3ジゲン ソクテイキヨウ タッチ シンゴウ プローブ ノ センサ キコウ ノ カイハツ
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Abstract
A touch trigger probe sensor for coordinate measuring machines (CMM) detects a contact between a spherical stylus tip and an object to be measured. The conventional probes are not suitable for high speed measurement and high accuracy measurement of sub-micrometer order. A piezo-element novel sensor construction and a detecting circuit are proposed. To detect the impulsive contact force, four piezo-elements are mounted on a base of the stylus. The impulsive force brings a longitudinal wave and a bending wave which transmit separately in the stylus. The time difference between two waves arriving to the piezo-elements enlarges the detected position error. The two waves are detected electrically by the piezo-elements and separated by the detecting circuit, and the former signal is delayed so that two waves are seemed to arrive simultaneously at the piezo-elements. By the above signal processing, the error are improved to at most 50nm dispersion, at all of the force directions in a half sphere of the spherical stylus tip for a probing speed of 3-60mm/s.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 66 (2), 304-308, 2000
The Japan Society for Precision Engineering
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Details 詳細情報について
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- CRID
- 1390001204764940800
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- NII Article ID
- 110001372885
- 10006915953
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 4985920
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed