書誌事項
- タイトル別名
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- Development of Water-Soluble Coolant for Multiwire Saw Slicing. Study on 400mm-Diameter Silicon Ingot Slicing. (1st Report).
- マルチ ワイヤソー セツダンヨウ スイヨウセイ クーラント ノ カイハツ ファイ 400mm シリコンインゴット ノ セツダン ニ カンスル ケンキュウ ダイ1ポウ
- Study on 400mm-Diameter Silicon Ingot Slicing (1st Report)
- φ400mmシリコンインゴット切断に関する研究 第1報
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This paper presents the constituent features of the newly developed water-soluble coolant for the multiwire saw slicing of 400mm-diameter silicon ingots. Although the water-soluble coolant has long been awaited for its intrinsic merits over the conventional mineral oil-based coolants, it was not adoptable to the large diameter slicing for its poor ability to suspend abrasives in the slurry. This newly developed coolant is the first successful water-soluble coolant to slice 400mm-diameter ingots, and has the following constituent features; (1) Polypropyleneglycol (PPG) is chosen as a base of the coolant which has no peculiar odor, and has a good bio-degradability. (2) The coolant contains approx. 20wt% of water with chemical affinity to bentonite, and gives non-flammability and non-evaporative characteristics. (3) In order to maintain the viscosity level and the good suspension of abrasives, the coolant contains 3 viscosity adjusting additives; bentonito (thixotropic rheology), cellulose (rheopectic rheology), and synthetic mica (constant viscosity).
収録刊行物
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- 精密工学会誌
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精密工学会誌 66 (6), 912-916, 2000
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390001204765217152
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- NII論文ID
- 110001368133
- 10009887275
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 5359941
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可