First-principles Molecular-dynamics Simulations of Material Surface Processing. H-termination Process of Si(001)Surface.
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- HIROSE Kikuji
- 正会員 大阪国際女子大学
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- GOTO Hidekazu
- 正会員 京都工芸繊維大学工芸学部
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- TSUCHIYA Hachiro
- 正会員 京都工芸繊維大学工芸学部
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- MORI Yuzo
- 正会員 大阪大学工学部
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- ENDO Katsuyoshi
- 正会員 大阪大学工学部
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- YAMAUCHI Kazuto
- 正会員 大阪大学工学部
Bibliographic Information
- Other Title
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- 材料表面現象の第一原理分子動力学シミュレーション シリコン単結晶(001)表面の水素終端化反応
- ザイリョウ ヒョウメン ゲンショウ ノ ダイ 1 ゲンリ ブンシ ドウリキガク
- H-termination Process of Si (001) Surface
- シリコン単結晶(001)表面の水素終端化反応
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Abstract
In order to analyse material surface processing, first-principles molecular-dynamics simulations are carried out. Density-functional theory, norm-conserving pseudopotential and plane-wave basis are used. Atomic, bond populations and local energy are proposed as estimation parameters of the stability of material surface atoms. As an example of application, H-termination process of Si (001) surface atom is numerically analysed. The results are the followings: The backbond strength of F-terminated Si surface atom decreases, and the Si atom shifts upward from the surface. When HF molecule attacks to the weakened Si backbond, the backbond vanishes and the H atom of HF moves to the Si atom of the second layer. From these results, it is confirmed that proposed method is useful to analyse surface chemical processes.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 60 (3), 402-406, 1994
The Japan Society for Precision Engineering
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Details 詳細情報について
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- CRID
- 1390001204765823232
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- NII Article ID
- 10004151247
- 110001371599
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 3864138
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed