気相合成によるダイヤモンドのラップ工具への応用

DOI Web Site

書誌事項

タイトル別名
  • Application of gas-phase synthesized diamonds to lapping tools.
  • キソウ ゴウセイ ニ ヨル ダイヤモンド ノ ラップ コウグ エ ノ オウヨウ

この論文をさがす

抄録

Diamond and amorphous carbon mixed deposits are synthesized on molybdenum substrates from methane and hydrogen gases by microwave plasma chemical vapor deposition (CVD) method at the methane concentration of 3%. The deposition process and the structure of the mixture deposits are investigated by SEM, X-ray diffraction and Raman spectroscopy, and it was found that the pyramidal-figure diamonds and amorphous carbon mixed particles are deposited at the first stage, then the diamond becomes a dominant factor, and the deposits grow to be (100) preferred diamonds. A lapping tool is prepared by using the diamond and amorphous carbon mixed fine grains which are deposited on molybdenum substrates. The lapping experiment of sintered alumina is conducted by this lapping tool. The sintered alumina surface is finished to 0.6 μm Rmax by 30 s lapping. The finishing rate of the alumina is about 1 μm/s. These results suggest that the gas-phase synthesized diamond can be used for the ceramic materials lapping tool.

収録刊行物

  • 精密工学会誌

    精密工学会誌 56 (2), 343-348, 1990

    公益社団法人 精密工学会

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ