Comparison of Precision to Projected Distortion Gratings for Shape Measurement by Whole-space Tabulation Method

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  • 矩形格子のデフォーカス投影による全空間テーブル化手法を用いた形状計測における計測精度の検討
  • クケイ ゴウシ ノ デフォーカス トウエイ ニ ヨル ゼン クウカン テーブルカ シュホウ オ モチイタ ケイジョウ ケイソク ニ オケル ケイソク セイド ノ ケントウ

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Whole-space tabulation method(WSTM) is a technique to relate the phase of a projected grating and the coordinates at each pixel of a camera. The relation data of all the pixels are obtained in the whole-space where a reference plane is moved. The relation data are stored in tables. Thereby, WSTM is high speed and accurate shape measurement method because the coordinates are obtained by only looking up the tables without any complex calculation. Even when the brightness distribution of the projected grating is warped from cosinusoidal wave, correct coordinates are provided. In this paper, it is confirmed that accurate shape measurement can be performed by defocusing a projected grating with a rectangular brightness distribution.

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