Laser Induced Modification in Glasses by CW Laser Backside Irradiation (CW-LBI)

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  • CWレーザ背面照射法(CW-LBI)によるガラスの内部変質（第5報）
  • CW レーザ ハイメン ショウシャホウ CW LBI ニ ヨル ガラス ノ ナイブ ヘンシツ ダイ5ホウ サマザマ ナ キンゾク ノ ガラス ナイブ エ ノ ドウニュウ
  • —Implantation of Various Metals into Glass—
  • —様々な金属のガラス内部への導入—

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We studied on the implantations of various metals into glass with a continuous-wave (CW) laser beam. Platinum, nickel, SUS304, tantalum, tin, silver and copper were examined to implant into borosilicate glass. Platinum, tantalum, tin and silver were deposited with a thickness of 1 μm and nickel, SUS304 and copper foils with a thickness of 10 μm were placed on the backside of the glass. A CW laser beam oscillating at a wavelength of 514 nm was used to illuminate the film through the glass. The laser beam was focused on the films by a convex lens. As a result, platinum, nickel and SUS304 were implanted in the same manner. However, tantalum, tin, silver and copper were not implanted. The thermal conductivities and melting points of the implanted metals were below 100 W/m·K and ranged from 1500 to 2200 K, respectively. We supposed that the temperature at the laser spot governed the difference. Hence, numerical calculations were performed to estimate the temperature. As a result, the temperature of platinum, nickel, SUS304, tantalum and tin exceeded their melting points within 0.01 s after the laser illumination, whereas those of silver and copper did not exceed their melting points even after 1s. The diameter of the particles was controlled by changing the film thickness. The diameters of the particles were ∼3 μm and ∼50 μm when the thicknesses of the deposited films were 0.1 μm and 5 μm, respectively.

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