弾性定盤を用いたガラス磁気ディスク基板のポリシング特性

書誌事項

タイトル別名
  • Polishing Characteristics of Glass Magnetic Disk Substrates Using Elastic Plates
  • ダンセイ ジョウバン オ モチイタ ガラス ジキ ディスク キバン ノ ポリシング トクセイ

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抄録

Glass disk substrates of 2.5 inch diameter were polished using two types of epoxy resin plate, which were of intermediate hardness between that of the metal lapping plate and polisher. The polishing characteristics were measured for various experimental conditions, such as the grooving condition, polishing pressure, and loose and/or fixed abrasives. From the experimental results, polishing using a combination of epoxy resin plates and CeO2 abrasives of average diameter 0.7 μm shows a higher removal rate (MRR > 1.0 μm /min) with good surface roughness (Ra < 1.0 nm), flatness (within 0.3 μm in a diameter), and edge accuracy around the substrate. The higher removal rate was achieved due to an increase in the real micro-contact area between the resin plate and substrate. This can be explained well by the comparatively large elastic deformation of the resin plates, which was simulated with the aid of finite element analysis.

収録刊行物

  • 精密工学会誌

    精密工学会誌 69 (10), 1469-1473, 2003

    公益社団法人 精密工学会

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