ＴＦＴ‐ＬＣＤにおける分割露光境界線の視認性に関する理論的考察

DOI Web Site Web Site

書誌事項

タイトル別名
  • Theoretical Consideration on Stepper Shot-Block Perception.
  • TFT LCD ニ オケル ブンカツ ロコウ キョウカイセン ノ シニンセイ

この論文をさがす

抄録

A large-area high-resolution TFT-LCD is fabricated using a step-aligner, because it's screen size exceeds the photo-mask size A shot-block boundary is sometimes perceived and deteriorates picture quality. The purpose of this paper is to investigate the shot-block perceptibility and the influences to TFT-LCD pixel design, theoretically. A new model with a level-shift voltage induced by a TFT parasitic capacitance has been introduced and an estimation of the currently available step-aligners, which have a maximum pattern-discontinuity of 1.2-1.5μm, showed that they would cause the shot-block images. A generalized design rule related to the shot-block image has been introduced. Using this rule, the aperture ratio of high-resolution TFT-LCDs were estimated and the results showed that the aperture ratio would decrease, as the number of gate lines increased. Possible methods to improve this phenomenon have been summarized.

収録刊行物

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ