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- Nakazawa Marie
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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- Tabaru Masaya
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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- Takayasu Toshiki
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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- Aoyagi Takahiro
- Graduate School of Decision Science and Technology, Tokyo Institute of Technology
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- Nakamura Kentaro
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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抄録
Eight- and 32-element ultrasonic array transducers using polyurea films are fabricated and experimentally tested in this study. Aromatic polyurea thin films, prepared by vapor deposition polymerization, are suitable for use as an ultrasonic transducer. In this paper, we present two types of polyurea array transducer with 20 and 200 μm pitches. The polyurea films were prepared through vapor deposition polymerization, and miniature electrode arrays were fabricated by a lithographic technique. Resonance frequencies of approximately 30, 65, and 100 MHz were observed in the electrical admittance. To examine the performances of the prototype array transducers, a pulse/echo test and phased array experiment were performed. From the experimental results, we found that the polyurea array transducers fabricated by the proposed method correctly operated as expected.
収録刊行物
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- Acoustical Science and Technology
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Acoustical Science and Technology 36 (2), 139-148, 2015
一般社団法人 日本音響学会
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詳細情報 詳細情報について
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- CRID
- 1390001205088499840
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- NII論文ID
- 130004923477
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- NII書誌ID
- AA11501808
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- ISSN
- 13475177
- 03694232
- 13463969
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- NDL書誌ID
- 026196060
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可