Application of Lignophenol to Positive-type Photoresists
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- KADOTA Joji
- Plastics Department, Osaka Municipal Technical Research Institute
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- HASEGAWA Kiichi
- Plastics Department, Osaka Municipal Technical Research Institute
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- FUNAOKA Masamitsu
- Faculty of Bioresources, Mie University
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- UCHIDA Toshikazu
- KOYO Chemicals Inc.
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- KITAJIMA Kouichirou
- KOYO Chemicals Inc.
Bibliographic Information
- Other Title
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- リグノフェノールを用いたフォトレジスト材料
- リグノフェノール オ モチイタ フォトレジスト ザイリョウ
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Description
Recently, lignophenols have been obtained from lignin in wood-sources, and now, the establishment of their use as industrial materials is required. We tried to apply them to positive-type photoresists for printing and printed wiring boards, because they have the advantages of (1) good solublity in alkaline water, (2) sensitivity to UV irradiation and (3) resistance to heat. We used them instead of novolac resins in a novolac/ diazonaphthoquinone system photoresist, resulting in giving photoresists with high sensitivity and less side etching through adding 3-nuclei novolac compounds to lignophenols.
Journal
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- Journal of Network Polymer,Japan
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Journal of Network Polymer,Japan 23 (3), 142-149, 2002
Japan Thermosetting Plastics Industry Association
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Details 詳細情報について
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- CRID
- 1390001205090135680
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- NII Article ID
- 130003389550
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- NII Book ID
- AN10521608
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- ISSN
- 13420577
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- COI
- 1:CAS:528:DC%2BD38XntlOltrc%3D
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- NDL BIB ID
- 6298726
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL Search
- CiNii Articles
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- Abstract License Flag
- Disallowed