磁気弾性歪センサのスマートアクチュエータへの応用
書誌事項
- タイトル別名
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- Application of magnetoelastic strain sensors to smart actuators.
- ジキ ダンセイ ヒズミ センサ ノ スマートアクチュエータ エ ノ オウヨウ
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説明
We studied linear compensation and precision control of nonlinear hysteric piezoelectric actuators using a highly magnetostrictive amorphous FeCoSiB film pattern as a strain sensor. The elements had a hybrid structure in which thin silicon substrates with the magnetostrictive films, the strain sensitivity of which was improved by annealing with bias stress, were bonded on PZT piezoelectric substrates. The magnetostrictive film as a strain sensor detects the deflection of the actuator, and a voltage signal from the strain sensor related to a deflection of the actuator is used for control of the actuator. The application of the actuator for control of the head-disk contact properties was demonstrated.
収録刊行物
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- 日本応用磁気学会誌
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日本応用磁気学会誌 24 (4-2), 975-978, 2000
公益社団法人 日本磁気学会
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詳細情報 詳細情報について
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- CRID
- 1390001205092395904
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- NII論文ID
- 110002810837
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- NII書誌ID
- AN0031390X
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- ISSN
- 18804004
- 02850192
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- NDL書誌ID
- 5351253
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDLサーチ
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- NDLデジコレ（旧NII-ELS）
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- 抄録ライセンスフラグ
- 使用不可
