MRヘッドギャップ用アルミナ膜の検討
書誌事項
- タイトル別名
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- Study of Alumina Films Used as MR Head Gap Materials
- MR ヘッド ギャップヨウ アルミナ マク ノ ケントウ
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抄録
The insulating properties, internal stress, and film structure of Si-O-added Al-O films, and their etching characteristics when immersed in water, were investigated to determine their suitability as shield MR head materials for high-density magnetic recording. The films showed good insulating properties, low internal compressive stress, and excellent corrosion resistance in water. It is concluded that the Si-O-added Al-O films with thicknesses of up to 50 nm should be adopted to reduce the thickness of gap-insulating film.
収録刊行物
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- 日本応用磁気学会誌
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日本応用磁気学会誌 22 (4_2), 257-260, 1998
公益社団法人 日本磁気学会
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詳細情報 詳細情報について
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- CRID
- 1390001205092700800
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- NII論文ID
- 110002811407
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- NII書誌ID
- AN0031390X
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- ISSN
- 18804004
- 02850192
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- NDL書誌ID
- 4458017
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- データソース種別
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- JaLC
- NDL
- Crossref
- NDL-Digital
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可