サブミクロン二次イオン質量分析装置を用いた鋼中非金属介在物粒子の粒別分析

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タイトル別名
  • Individual Analysis of Nonmetallic Inclusions in Steel by Using the Gallium Focused Ion Beam Secondary Ion Mass Spectrometry
  • サブミクロン2次イオン質量分析装置を用いた鋼中非金属介在物粒子の粒別分析
  • サブミクロン 2ジ イオン シツリョウ ブンセキ ソウチ オ モチイタ コウチ

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Nonmetallic inclusions frequently exert a lot of unfavorable influences on the quality of steel. The size of nonmetallic inclusions in current steel products is less than a few μm in diameter. It is desirable to make clear the origin and generation process of such small particles of nonmetallic inclusion. In order to measure the shape, size, composition and inner elemental distribution, development of characterization methods for each inclusion particle is required.<BR>By employing a gallium focused ion beam (FIB) as a primary ion beam of secondary ion mass spectrometry (SIMS), the particle analysis with high spatial resolution is easily achieved. In this paper, we present the novel individual analysis of nonmetallic inclusions in steel by gallium FIB SIMS.<BR>We analyzed in two ways the nonmetallic inclusion particles segregated by electron beam melting. (1) By crosssectioning of the particle using a gallium FIB, elemental maps of cross-section were obtained. The elements were distributed inhomogeneously on the cross-section. (2) We carried out the compositional analysis for several particles individually. Ten particles were analyzed by the shave-off analysis and the multivariate cluster analysis. Based on the composition of each particle, the inclusions were classified into six types.

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  • 鉄と鋼

    鉄と鋼 81 (10), 977-982, 1995

    一般社団法人 日本鉄鋼協会

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