Sintering of titanium oxynitride.

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  • SATO Shigehiro
    Department of Inorganic Materials, Faculty of Engineering, Tokyo Insitute of Technology
  • SHINOZAKI Kazuo
    Department of Inorganic Materials, Faculty of Engineering, Tokyo Insitute of Technology
  • UEMATSU Keizo
    Department of Inorganic Materials, Faculty of Engineering, Tokyo Insitute of Technology
  • MIZUTANI Nobuyasu
    Department of Inorganic Materials, Faculty of Engineering, Tokyo Insitute of Technology
  • KATO MASANORI
    Department of Inorganic Materials, Faculty of Engineering, Tokyo Insitute of Technology

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Other Title
  • 酸窒化チタンの焼結
  • 酸窒化チタンの焼結〔英文〕
  • サン チッカ チタン ノ ショウケツ エイブン

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Abstract

Sintering of titanium oxynitride, TiOxNy (x+y≈1, x=0.07-1.00, y=0-0.89) was studied at 1000°-1400°C. The rate of sintering decreased markedly with increasing nitrogen content, y. The results were tentatively analyzed with an initial stage sintering equation. The diffusion coefficient of rate limiting species of sintering changes four orders of magnitude for TiO in which -90% of oxygen was substituted with nitrogen. The relation between the defect concentration and the diffusion coefficient of rate limiting species of sintering was discussed.

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