半導性強誘電体を用いた新モノリシックアクチュエーター, “モノモルフ”

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書誌事項

タイトル別名
  • New Monolithic Actuators, “Monomorphs”, Using Semiconductive Ferroelectrics
  • ハンドウセイ キョウユウデンタイ オ モチイタ シン モノリシック アクチュエ

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抄録

A New actuator device is proposed using semiconductive ferroelectric ceramics. This device is a single-plate actuator capable of bending equivalently to a bimorph. A significant difference is simple structure named as a “monomorph” as compared with a multi-stacked type in the bimorph. The bend in the monomorph device is realized by non-uniform electric field distribution in the piezoelectric ceramics, through the semiconductor-metal contact effect (Schottky barrier). The monomorph has been demonstrated in the solid solutions PbZrO3-(K1/2Bi1/2)ZrO3 and BaTiO3-Dy2O3. Both systems reveal the tip deflectionof several hundred micrometers in a 0.5mm thick plate.

収録刊行物

  • 窯業協會誌

    窯業協會誌 95 (1103), 722-725, 1987

    公益社団法人 日本セラミックス協会

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