RF-スパッタリング法により作製したCdSe微粒子ドープガラス薄膜の微細構造と光学的特性

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  • Microstructure and Optical Properties of CdSe Microcrystals-Doped SiO<sub>2</sub> Glass Thin Films Prepared by RF-Sputtering
  • RF スパッタリングホウ ニ ヨリ サクセイシタ CdSe ビリュウシ ドープ

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SiO2 glass thin films doped with CdSe microcrystals were prepared by the RF-sputtering technique. The concentration and mean diameter of the microcrystals strongly depended on the relative surface area of CdSe chips on SiO2 target, and the size distribution was remarkably influenced by the substrate temperature. The size distribution was independent of the mean diameter, and standard deviation was below 10.0Å which is nearly half of that of CdSxSe1-x microcrystals in a typical commercial filter glass. The quantum size effect in CdSe crystals was found from the blue shift of the optical absorption edge. However, the shift clearly deviated from the simple theoretical predictions based on the confined exciton effect and individually confined electron and hole effect. Thus, introduction of electric correlation of electron-hole and the influence of the matrix on the dielectric constant of the microcrystals into the latter effect were found to be necessary to obtain good agreement with the experimental data. Quantum confined Stark effect would iufluence the electro-optic effect of the film.

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