Synthesis of Fine AlN Powder by Vapor Phase Reaction of AlCl<sub>3</sub> and NH<sub>3</sub>

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  • KIMURA Isao
    Department of Chemical Engineering, Faculty of Engineering, Niigata University
  • HOTTA Noriyasu
    Department of Chemical Engineering, Faculty of Engineering, Niigata University
  • NUKUI Hideki
    Department of Chemical Engineering, Faculty of Engineering, Niigata University
  • SAITO Natsukaze
    Department of Chemical Engineering, Faculty of Engineering, Niigata University
  • YASUKAWA Saburo
    Department of Chemical Engineering, Faculty of Engineering, Niigata University

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Other Title
  • AlCl<sub>3</sub>とNH<sub>3</sub>の気相反応によるAlN微粉末の合成
  • AlCl3 ト NH3 ノ キソウ ハンノウ ニ ヨル AlN ビフンマツ ノ

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Abstract

Fine AlN powder was synthesized by vapor phase reaction of AlCl3 and NH3 at 720°-1190°C. Most of the powder deposited separately in two regions in the reactor. The powder deposited in the range between the end of AlCl3-feeding tube and the point 17cm apart there from consisted of one phase AlN. The particle size and its distribution became fine and uniform at high reaction temperature or at high total flow rate of NH3 and N2. Fine powder with the median diameter of 0.16μm was synthesized at 1190°C and particles were within a narrow range from 0.1 to 3.0μm. In the range between 20 and 33cm apart from the end of the AlCl3-feeding tube, amorphous AlN deposited, which crystallized on heating at 1400°C. Byproduct, NH4Cl which coexisted with amorphous AlN, was easily eliminated by heating at 500°C. The formation rate of crystalline AlN was 2.2g·h-1 and the total yield of crystalline and amorphous AlN was 79%.

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