エバネッセント光を利用したナノ光造形法に関する研究（第1報）

DOI Web Site 被引用文献3件 参考文献19件

書誌事項

タイトル別名
  • Study of Nano-Stereolithography Using Evanescent Light (1st report)
  • エバネッセントコウ オ リヨウ シタ ナノ ヒカリ ゾウケイホウ ニ カンスル ケンキュウ ダイ1ポウ ゾウケイ キホン トクセイ ノ リロンテキ ジッケンテキ ケントウ
  • - Theoretical and Experimental Analyses -
  • －造形基本特性の理論的・実験的検討－

この論文をさがす

抄録

Micro-fabrication technologies have recently developed dramatically and fabrication methods have become much-needed with which devices on the order of micrometer can be fabricated precisely. In particular, methods of fabricating MEMS and microscopic optical devices as typified by a photonic crystal are in huge demand. In this study, we propose a novel stereolithography method using evanescent light instead of propagating light to realize a 100-nanometer resolution. With this method, we intend to establish the nano-stereolithography with higher accuracy and flexibility. In the first report, we carry out theoretical and experimental analyses to verify the feasibility of the method. The analyses show that evanescent light energy is sufficient for curing photosensitive resin and that it is possible to fabricate micro three-dimensional objects with a 100-nanometer resolution by laminating resin layers cured by evanescent light exposure.

収録刊行物

被引用文献 (3)*注記

もっと見る

参考文献 (19)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ