Uncertainty Evaluation for the Low Thermal Expansion Glass Gauge Blocks by Optical Interferometry

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  • 低熱膨張ガラス製長尺ブロックゲージの光波干渉計による校正不確かさの評価
  • テイネツ ボウチョウ ガラスセイ チョウシャク ブロックゲージ ノ コウハ カンショウケイ ニ ヨル コウセイ フ タシカ サ ノ ヒョウカ

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Evaluation of the uncertainty for the measurement of the low thermal expansion glass gauge blocks by optical interferometry is presented. The thermal expansion coefficient of the evaluated glass gauge block is about 140 times smaller than that of the steel gauge block. We mainly evaluated the uncertainty of the wringing and the measurement of the excess fraction part of interference fringe order. The combined standard uncertainty of the glass gauge block is about 36 nm in 1000 mm gauge block. This value of uncertainty is almost half of that of the steel gauge blocks.

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