Study of a Laser Material Processing System with a Fine Optical Setup using a Shrink Fitter
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- NONAKA Satoshi
- 新潟大学大学院生
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- NITTA Isami
- 新潟大学
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- KANNO Akihiro
- 新潟大学大学院生
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- NISHIMURA Masakazu
- 新潟大学大学院生
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- HAGA Ryosuke
- 新潟大学大学院生
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- TUCHIDA Keiichi
- 長岡工業高等専門学校
Bibliographic Information
- Other Title
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- シュリンクフィッタを用いた高精度光学系によるレーザ微細加工装置の開発
- シュリンクフィッタ オ モチイタ コウセイド コウガクケイ ニ ヨル レーザ ビサイ カコウ ソウチ ノ カイハツ
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Abstract
In order to realize fine processing with a high precision optical system, we have developed a laser processing system with galvanometer scanners and optical lenses using a shrink fitter. The shrink fitter prevents the misalignment of the lenses at the elevated temperature. Therefore fine laser spots can be obtained over the quite wider scanning width, even at elevated temperatures. We examined the possibility of application to laser processing of this lens system using the shrink fitter.<br>Diameters of the lenses used in this study were 160 mm so that the laser spots could be scanned over the width of 100 mm, in both directions of the X-axis and Y-axis. There was large distortion of the laser beam which was inherent to each lenses and can not be removed by mechanical adjustment So we introduced the formula to correct the beam path using the least square method. Finally, we developed the fine laser processing system using shrink fitter.
Journal
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- Journal of the Japan Society for Precision Engineering, Contributed Papers
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Journal of the Japan Society for Precision Engineering, Contributed Papers 72 (3), 403-407, 2006
The Japan Society for Precision Engineering
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Details
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- CRID
- 1390001205281692032
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- NII Article ID
- 110004656748
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- NII Book ID
- AA11966630
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- ISSN
- 18818722
- 13488716
- 13488724
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- HANDLE
- 10191/24304
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- NDL BIB ID
- 7868327
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- Data Source
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- JaLC
- IRDB
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed