The 64th CerSJ Awards for Advancements in Ceramic Science and Technology: Structural and dielectric properties of epitaxial (Ba,Sr)TiO3 films on c-Al2O3 with ultra-thin TiN sacrificial template
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- YAMADA Tomoaki
- Department of Materials, Physics and Energy Engineering, Nagoya University
書誌事項
- タイトル別名
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- Structural and dielectric properties of epitaxial (Ba,Sr)TiO3 films on c-Al2O3 with ultra-thin TiN sacrificial template
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Using ultra-thin TiN sacrificial template, the epitaxial (Ba,Sr)TiO3 [BST] films on c-Al2O3 were grown by pulsed laser deposition. TiN epitaxially grew on c-Al2O3 with (111) orientation, which promoted the (111) epitaxial growth of upper BST films. The obtained epitaxial BST films showed significantly larger dielectric constant compared with polycrystalline films directly deposited on c-Al2O3 over the wide temperature range. By inserting the TiN template, the temperature corresponding to maximum dielectric constant of BST films was shifted up by 50 K, which is mainly due to the in-plane tensile strain induced by the difference in thermal expansion coefficients of BST and c-Al2O3.
収録刊行物
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- Journal of the Ceramic Society of Japan
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Journal of the Ceramic Society of Japan 119 (1388), 261-265, 2011
公益社団法人 日本セラミックス協会
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詳細情報 詳細情報について
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- CRID
- 1390001205285854080
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- NII論文ID
- 130000662353
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- NII書誌ID
- AA12229489
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- ISSN
- 13486535
- 18820743
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- NDL書誌ID
- 11033401
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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