Effect of Perpendicular Magnetic Anisotropy on the High Frequency Soft Magnetic Properties of Co-Al-N Films

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  • Kijima H.
    Center for Interdisciplinary Research, Tohoku University
  • Ohnuma S.
    Research Institute for Electromagnetic Materials
  • Masumoto H.
    Center for Interdisciplinary Research, Tohoku University

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  The high frequency soft magnetic properties (μ-f properties) of magnetically isotropic Co-Al-N films have been investigated. The Co-Al-N films with a Co content of around 80 at.% were prepared by the rf-sputtering method to change the distance between target and substrate (dT-S). The magnetization curves reveal that the films have a perpendicular magnetic anisotropy and are magnetically isotropic in the film plane. The saturation magnetic field (Hs) can be changed from 120 to 640 Oe as dT-S increases from 40 to 80 mm. The films show a stripe domain with a domain width of 400-500 nm, which decreases as increasing the perpendicular magnetic anisotropy increases. The films exhibit excellent μ-f properties, and their permeability keeps constant up to a few GHz and shows a clear peak at resonance frequency (fr), which shifts from 0.75 to 2.4 GHz correspond to the magnitude of their Hs.

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