Joining of silicon nitride with silicon slurry via reaction bonding and post sintering

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  • KONDO Naoki
    Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)
  • HYUGA Hideki
    Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)
  • KITA Hideki
    Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)

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説明

Joining of silicon nitride parts by a silicon nitride joint without mechanical pressure was attempted. Reaction-bonded silicon nitride (RBSN) parts were joined using a silicon slurry by a slip-cast technique, followed by reaction bonding and post-sintering. The sintering process changed the original RBSN parts and the consolidated silicon slurry to dense silicon nitride. The joined silicon nitride was successfully obtained and it exhibited an average strength of 404 MPa. Therefore, this technique has the potential to produce strong joints.

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