Micro gas sensor assembly of tin oxide nano-particles by a capillary micro-molding process
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- FUDOUZI Hiroshi
- National Institute for Materials Science
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- SAKKA Yoshio
- National Institute for Materials Science
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This paper reports a micro gas sensor assembled with tin oxide, SnO2, nano-powders. The micro gas sensors are fabricated by a modified micro molding in capillary (MIMIC) technique using an ethanol suspension with 2.0 vol% SnO2 nano-powders. A micro pattern is formed as a set of parallel lines 23 μm in width and 1.2 μm in depth. The micro pattern is heat treated at 300°C for 5 h. The micro-sensor was able to detect ethanol gas by measuring the electrical resistance of the tin oxide a glass tube furnace. When ethanol vapor flows through the furnace the resistance decreases and the response time is 1.9 s. The sensor resistance ratio was determined to be 19.5 at 450°C. Our modified MIMIC technique enables easy and simple fabrication of ethanol vapor micro-sensors in a cost-effective way.
収録刊行物
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- Journal of the Ceramic Society of Japan
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Journal of the Ceramic Society of Japan 118 (1375), 202-205, 2010
公益社団法人 日本セラミックス協会
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詳細情報 詳細情報について
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- CRID
- 1390001205287402752
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- NII論文ID
- 130000304713
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- NII書誌ID
- AA12229489
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- ISSN
- 13486535
- 18820743
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- NDL書誌ID
- 10575501
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 使用不可