The Electron Stimulated Desorption Ions from the Grid Surface of the Ionizer of the Quadrupole Mass Spectrometer: Species and Pressure Dependence
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- TAKAHASHI Naoki
- ULVAC Inc.
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- TUZI Yutaka
- ULVAC Inc.
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- ARAKAWA Ichiro
- Department of Physics, Gakushuin Univ.
Bibliographic Information
- Other Title
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- 四極子形質量分析計のイオン源グリッド表面から放出された電子励起脱離イオン:脱離イオン種と圧力依存性
- 4キョクシ ケイシツリョウ ブンセキケイ ノ イオンゲン グリッド ヒョウメン カラ ホウシュツサレタ デンシ レイキ ダツリ イオン ダツリ イオンシュ ト アツリョク イソンセイ
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Abstract
The pressure dependence of the electron stimulated desorption (ESD) ions were investigated by the quadrupole mass spectrometer with a Bessel-box type energy analyzer. The mass spectra of the ESD ions were measured under introduction of H2O, CO, O2 and CO2. The ESD ion peaks for those gasses were observed at O+ (m/z=16). The mass spectra of the gas phase ions were also measured and compared with those of ESD ions during the pumping down process. The origin of the main species in ESD ions, O+, was the adsorbed H2O on the grid surfaces.<br>
Journal
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 51 (8), 563-568, 2008
The Vacuum Society of Japan
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Details 詳細情報について
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- CRID
- 1390001205294252928
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- NII Article ID
- 10024274637
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- NII Book ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL BIB ID
- 9639567
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed