書誌事項
- タイトル別名
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- Development of a pressure sensor using a piezoelectric material thin film
- アツデンタイ ハクマク オ モチイタ アツリョク センサー ノ カイハツ : リョウサンシャヨウ ネンショウアツ センサー エ ノ オウヨウ
- — Application to a combustion pressure sensor for mass-produced cars —
- － 量産車用燃焼圧センサーへの応用 －
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説明
In this paper, we show the process of research and development of a combustion pressure sensor using an aluminum nitride (AlN) thin film, which we developed for the first time in the world. At the time we envisaged the R&D in 2003, most sensors used a piezoelectric single crystal. The research of a combustion pressure sensor using an AlN thin film was an unexplored field, and the usefulness of an AlN thin film was not yet well recognized. However, since we started the R&D, domestic and foreign auto parts companies and universities showed interest, and we carried out joint research with a domestic company and a university toward practical use of the sensor. Consequently, we have succeeded in developing a sensor of small size, high sensitivity, and without the need of cooling. We now conduct research to resolve the problems such as stabilization of sensor signals and simplification of the sensor structure for practical use.
収録刊行物
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- Synthesiology
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Synthesiology 5 (3), 162-170, 2012
国立研究開発法人 産業技術総合研究所
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詳細情報 詳細情報について
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- CRID
- 1390001205295173760
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- NII論文ID
- 130004952729
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- NII書誌ID
- AA12294844
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- ISSN
- 18827365
- 18826229
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- NDL書誌ID
- 023931169
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
