Development of laser-assisted inkjet printing technology

DOI Web Site 2 Citations 8 References
  • ENDO Akito
    Advanced Manufacturing Research Institute, AIST
  • AKEDO Jun
    Advanced Manufacturing Research Institute, AIST

Bibliographic Information

Other Title
  • レーザー援用インクジェット技術の開発―高スループットとファイン化の両立を目指した配線技術―
  • レーザー エンヨウ インクジェット ギジュツ ノ カイハツ コウスループット ト ファインカ ノ リョウリツ オ メザシタ ハイセン ギジュツ
  • - Wiring technology to achieve high throughput and fine patterning simultaneously -
  • —高スループットとファイン化の両立を目指した配線技術—

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Description

A new processing technology that can be easily adapted to various circuit designs and production in small lots has been requested for implementation into electronic device manufacturing where low cost device fabrication on large area is required. We have developed a laser-assisted inkjet printing technology which can achieve high throughput and fine patterning simultaneously. To realize fine patterning with low resistivity, ejected ink-droplets have been dried by laser irradiation to suppress expansion on a substrate, a problem often observed in a conventional inkjet process. Drawing of fine wiring with aspect ratio of 1 or above with line width of 10 m or less has been achieved using this new approach. This paper describes the flow of R&D from needs-driven target setting, process to overcome tasks, to achievement of the laser assisted inkjet printing technology.

Journal

  • Synthesiology

    Synthesiology 4 (1), 1-10, 2011

    National Institute of Advanced Industrial Science and Technology

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