Basics of Vacuum Measurement from viewpoint of Metrology (4) Long-term Stability of Vacuum Gauges

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  • YOSHIDA Hajime
    National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST)

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  • 測定学から見た真空計測の基礎 (4)　真空計の長期安定性
  • ソクテイガク カラ ミタ シンクウ ケイソク ノ キソ(4)シンクウケイ ノ チョウキ アンテイセイ
  • Basics of Vacuum Measurement from viewpoint of Metrology (4) Long-term Stability of Vacuum Gauges

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Abstract

  This fourth lecture of “Basics of Vacuum measurement from viewpoint of Metrology” introduces the long-term stability of vacuum gauges, such as capacitance diaphragm gauges (CDGs), high accuracy pressure gauges, spinning rotor gauges (SRGs), ionization gauges (IGs), and quadrupole mass spectrometers (QMSs). The data includes results obtained by laboratory experiments, stability of transfer standards for international comparisons, and calibration experiences of customer gauges by both national metrology institutes and vacuum gauge manufacturers. It is important to understand general trends of their long-term stabilities for reliable vacuum pressure measurements.<br>

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