書誌事項
- タイトル別名
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- Trend of MEMS Devices and Role of Vacuum Technologies
- MEMS デバイス ノ ドウコウ ト シンクウ ギジュツ ノ ヤクワリ
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Recently, microelectromechanical systems (MEMS) are installed in most automobiles and portable electronic devices like as smartphone. MEMS devices have evolved dramatically by vacuum technologies. Early MEMS devices were fabricated by anisotropic wet etching process. Current MEMS devices are fabricated by vacuum processes based on semiconductor fabrication technologies. Vacuum technologies are also used for a control of dynamic characteristics of MEMS devices in hermetically--sealed package. In this paper, we report the trend of MEMS devices and the role of vacuum technologies, for pressure sensors, accelerometers, mirror devices and field emission devices, as examples.<br>
収録刊行物
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- Ｊｏｕｒｎａｌ ｏｆ ｔｈｅ Ｖａｃｕｕｍ Ｓｏｃｉｅｔｙ ｏｆ Ｊａｐａｎ
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Ｊｏｕｒｎａｌ ｏｆ ｔｈｅ Ｖａｃｕｕｍ Ｓｏｃｉｅｔｙ ｏｆ Ｊａｐａｎ 56 (10), 403-408, 2013
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390001205296293504
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- NII論文ID
- 130003384885
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- NII書誌ID
- AA12298652
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- BIBCODE
- 2013JVSJ...56..403G
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- COI
- 1:CAS:528:DC%2BC3sXhvFakt7%2FK
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- ISSN
- 18824749
- 18822398
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- NDL書誌ID
- 024944282
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可