書誌事項
- タイトル別名
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- Simulation Technology for Micro-Electro-Mechanical-Systems (MEMS) Development
- MEMS カイハツ ニ オケル カイセキ シエン ギジュツ
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抄録
MEMS (Micro Electro Mechanical Systems) are an important technological field that is expected as a small-sized, energy-saving and high-performance key device. However, since development of MEMS requires considerable expenses and time, reduction of the testing expense, shortening of the development period and improvement of the yield ratio are expected with use of a simulator. Although leading MEMS foundries have begun to utilize simulators made abroad, purely domestic “Computer Aided Engineering System for Micro Electro-Mechanical Systems (MemsONE)” developed in a national project have come into use recently.<br>
収録刊行物
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- Ｊｏｕｒｎａｌ ｏｆ ｔｈｅ Ｖａｃｕｕｍ Ｓｏｃｉｅｔｙ ｏｆ Ｊａｐａｎ
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Ｊｏｕｒｎａｌ ｏｆ ｔｈｅ Ｖａｃｕｕｍ Ｓｏｃｉｅｔｙ ｏｆ Ｊａｐａｎ 56 (10), 409-416, 2013
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390001205296294528
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- NII論文ID
- 10031202143
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- NII書誌ID
- AA12298652
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- BIBCODE
- 2013JVSJ...56..409S
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- COI
- 1:CAS:528:DC%2BC3sXhvFakt7%2FL
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- ISSN
- 18824749
- 18822398
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- NDL書誌ID
- 024944304
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可