Suggestion of Evaluation method for Adhesion of DLC Films Using Scratch Test and 180 Degree Bend Test

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  • スクラッチ試験と１８０度曲げ試験を用いたＤＬＣ膜の密着性評価法の提案
  • スクラッチ シケン ト 180ド マゲ シケン オ モチイタ DLCマク ノ ミッチャクセイ ヒョウカホウ ノ テイアン

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Abstract

A new formula to calculate Adhesion energy W of DLC films was suggested on the base of Bull's model using Critical load Lc by scratch test in consideration of compressive residual stress σres in the film. Beside, a new Adhesion parameter J indicating Adhesion energy of the film was derived using fractured area ratio Rb by 180° bend test. Further, with DLC films practically deposited on SUS304 under the various deposition conditions by UBM sputtering, Lc by scratch test, σres by substrate curvature measuring test, Young's modulus EF by nano-indentation test, and Rb by 180° bend test were obtained. Validity of these formula and parameter for Adhesion energy were assessed by evaluating changes in Lc, σres, EF, Rb, W, and J with deposition conditions of the DLC films. Critical load Lc by scratch test changed significantly depending on the changes in mechanical property of EF, and Rb by 180° bend test changed with film thickness, were considered to be unreasonable as evaluating of film adhesion. While Adhesion energy W and Adhesion parameter J calculated by the formula suggested in this paper had a proportional relationship regardless of the deposition conditions. Both W and J were concluded to be derived appropriately for the evaluation of DLC film adhesion.

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