書誌事項
- タイトル別名
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- Measurement of Local Electrical Conductivity by Four-Point Probe Atomic Force Microscope Technique
- 4タンシンガタ ゲンシカンリョク ケンビ ギジュツ ニ ヨル キョクショ リョウイキ ニ オケル ドウデンリツ ノ テイリョウ ヒョウカ
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Development of an atomic force microscope (AFM) probe for local electrical conductivity measurement is reviewed. Electrical conductivity of a 99.999% aluminum wire having a 400nm width and a 350nm thickness was measured by the four-point (4P) AFM probe. This technique is a combination of the principles of the four-point-probe method and standard AFM. The instrument is capable of simultaneously measuring both surface topography and local conductivity. The repeatability of conductivity measurements indicates that this 4P-AFM probe could be used for fast in situ characterization of local electrical properties of nanocircuits and nanodevices.
収録刊行物
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- 材料
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材料 56 (10), 896-899, 2007
公益社団法人 日本材料学会
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詳細情報 詳細情報について
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- CRID
- 1390001205419130112
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- NII論文ID
- 130002085980
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- NII書誌ID
- AN00096175
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- ISSN
- 18807488
- 05145163
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- NDL書誌ID
- 8976671
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可