書誌事項
- タイトル別名
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- Measurement of film thickness distribution by surface plasmon resonance using a micro-lens array
抄録
In order to measure the two-dimensional distribution of the thickness of a metal layer coated on a dielectric layer at a time, we propose to use a micro-lens array (MLA), instead of a conventional single plano-convex lens, by which lots of surface-plasmon-resonance (SPR) dip patterns could be observed from a modified Otto configuration. The individual micro lenses produce circular ring-shaped SPR dip patterns in reflection, which enable us to estimate the thickness of the metal with high sensitivity and precision with ease. A spatial resolution is determined by the size of each lens and is 300 μm in diameter. As a proof-of the principle experiment, we measured the thickness of a 50nm-thickness Au film with precision ±0.9 nm for an area of 2.7 mm×2.7 mm. A method for improving the spatial resolution further is discussed.
収録刊行物
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- 日本機械学会論文集
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日本機械学会論文集 81 (832), 15-00291-15-00291, 2015
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390001205516721024
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- NII論文ID
- 130005118087
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- ISSN
- 21879761
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可