Measurement of film thickness distribution by surface plasmon resonance using a micro-lens array

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  • マイクロレンズアレイを用いた表面プラズモン共鳴による膜厚分布測定

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In order to measure the two-dimensional distribution of the thickness of a metal layer coated on a dielectric layer at a time, we propose to use a micro-lens array (MLA), instead of a conventional single plano-convex lens, by which lots of surface-plasmon-resonance (SPR) dip patterns could be observed from a modified Otto configuration. The individual micro lenses produce circular ring-shaped SPR dip patterns in reflection, which enable us to estimate the thickness of the metal with high sensitivity and precision with ease. A spatial resolution is determined by the size of each lens and is 300 μm in diameter. As a proof-of the principle experiment, we measured the thickness of a 50nm-thickness Au film with precision ±0.9 nm for an area of 2.7 mm×2.7 mm. A method for improving the spatial resolution further is discussed.

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