Packaging Technology of MEMS Mirror Array for Wavelength Selective Switches (WSS) (2)

DOI

Bibliographic Information

Other Title
  • 波長選択スイッチ(WSS)用MEMSミラーアレイのモジュール化技術(2)

Description

As several mirrors should be closely arranged in a MEMS mirror array developed for wavelength selective switches (WSSs), electrical interference can occur between adjacent mirrors. Mirror angle variations caused by electrical interference causes loss changes in the WSS. Therefore, reducing the electrical interference in the mirror array is one of the most important requirements. We designed a new electrode structure to reduce electric interference between adjacent channels. We fabricated a 50-channel mirror array module and confirmed that the module has good characteristics.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390001205555744000
  • NII Article ID
    130005469640
  • DOI
    10.11486/ejisso.24.0_256
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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