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Ultra-precision Air-pin Sensor and its Dynamic characteristic research
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- Hui Zhang
- Dept. of Precision Instrument, Hefei University of Technology
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- Shan Chen
- Dept. of Precision Instrument, Hefei University of Technology
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- Shanxi Deng
- Dept. of Precision Instrument, Hefei University of Technology
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- Huiqing Wang
- Dept. of Precision Instrument, Hefei University of Technology
Description
Non-contact pneumatic measurement technique is an important method in the dimension measurements of machine parts. In the recent years, the authors have developed the new type of air-pin pneumatic-electronic sensor. In this paper, Ultra-precision Air-pin Sensor and Its Dynamic Characteristic have been studied. The air-pin pneumatic-electronic sensor with 10μm in the measurement range, and its measurement accuracy is better than 0.1μm, and its response time is less 10ms.
Journal
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- SICE Annual Conference Program and Abstracts
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SICE Annual Conference Program and Abstracts 2002 (0), 475-475, 2002
The Society of Instrument and Control Engineers
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Details 詳細情報について
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- CRID
- 1390001205585580544
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- NII Article ID
- 130006960458
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- Text Lang
- en
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed
