The evaluation of chemical contamination control by low out-gassing paints in the cleanroom

DOI

Bibliographic Information

Other Title
  • 分子汚染対策塗料によるクリーンルーム有機濃度低減効果

Description

The organic compounds contamination control in the cleanroom had been recognized as the important problem of the semiconductor and liquid crystal display manufacturing environment. We developed the low out-gassinng epoxy resin paint and acrylic emulsion paint used as the interior material of the cleanroom and examined their total hydrocarbon(THC) gas emission characterisitics. As a result of the investigation, THC gas emission rate from the improved paint was reduced than the normal paint, And we confirmed that the low out-gassing paint was effective for the organic contamination control in the cleanroom.

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Keywords

Details 詳細情報について

  • CRID
    1390001205607549312
  • NII Article ID
    130006965879
  • DOI
    10.14820/finex.2002.0.15.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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