Piezoelectric property of PZT-PNN thick film determined by double beam laser-Doppler-velocimeter and finite element method

DOI

Bibliographic Information

Other Title
  • ダブルビーム式レーザドップラー速度計と有限要素法を用いた PZT-PNN 厚膜の圧電特性解析

Description

Recently, piezoelectric thick films are extensively studied for the use in micro actuator applications due to their large piezoelectric displacement and generative force. In this study, we proposed a new method to determine the piezoelectric constant of thick films using a double-beam laser Doppler interferometer combined with the analysis with finite element method (FEM). PZT-PNN thick film was fabricated by an interfacial polymerization process on Si substrate. A brass plate with a hole of 1mm &phi was attached on the back of the substrate to restrict the vibration area of piezoelectric films. The vibrated behavior of this thick film measured with this system was the same as the model calculated by FEM. From the FEM analysis, piezoelectric and elastic constants of the thick film could be determined.

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Details 詳細情報について

  • CRID
    1390001205612396160
  • NII Article ID
    130006968360
  • DOI
    10.14853/pcersj.2003s.0.257.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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