Control of Supplied Air Pressure Fluctuation for an Anti-vibration Apparatus

DOI

Bibliographic Information

Other Title
  • 空圧式除振装置の供給空気圧変動外乱の抑制法

Abstract

In the field of precision measurement and positioning, air-type anti-vibration apparatuses are commonly used. There is the pressure fluctuation of supplied air and then the position fluctuation of isolated table due to the supplied air pressure is generated. This pressure fluctuation can be usually suppressed using the multi-connection of air regulator. However, the drawback is that this connection method produces the pressure loss. In this paper, a method to reduce the position fluctuation is presented.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390001205646159744
  • NII Article ID
    130005025253
  • DOI
    10.11511/jacc.51.0.7.0
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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