Implementation of Flow Disturbance Observer for Air Spring Type Anti-Vibration Apparatus
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- Fukuda Ryo
- Tokyo Univercity of Agriculture and Technology
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- Nakamura Yukinori
- Tokyo Univercity of Agriculture and Technology
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- Wakui Shinji
- Tokyo Univercity of Agriculture and Technology
Bibliographic Information
- Other Title
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- 空圧系除振装置に対する流量外乱オブザーバの実装
Abstract
On the site of industry, flow disturbance happens frequently. It was previously proved that swing of isolated table is canceled by using the feedforward control. However, the feedforward control is required the pressure sensor, and then the cost is required for arrange the pressure sensor. To overcome the problem, the vibration of isolated table is restrained with disturbance observer.
Journal
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- Proceedings of the Japan Joint Automatic Control Conference
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Proceedings of the Japan Joint Automatic Control Conference 53 (0), 253-253, 2010
The Japan Joint Automatic Control Conference
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Details 詳細情報について
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- CRID
- 1390001205647478272
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- NII Article ID
- 130005025750
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed