Implementation of Flow Disturbance Observer for Air Spring Type Anti-Vibration Apparatus

DOI

Bibliographic Information

Other Title
  • 空圧系除振装置に対する流量外乱オブザーバの実装

Abstract

On the site of industry, flow disturbance happens frequently. It was previously proved that swing of isolated table is canceled by using the feedforward control. However, the feedforward control is required the pressure sensor, and then the cost is required for arrange the pressure sensor. To overcome the problem, the vibration of isolated table is restrained with disturbance observer.

Journal

Details 詳細情報について

  • CRID
    1390001205647478272
  • NII Article ID
    130005025750
  • DOI
    10.11511/jacc.53.0.253.0
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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