Development of laser interferometer with picometer resolution using frequency tunable laser

Bibliographic Information

Other Title
  • 周波数可変レーザを用いたピコメートル干渉測長法の開発
  • The 6th report Air refractive index fluctuation compensation for displace measuremet
  • 第六報 周波数可変レーザを用いた変位計測の屈折率変動補償

Description

Laser interferometer for lenght or displacement measurement widely used in the precision engineering field. A cyclic error and an influence of air refractive index fluctuation are included in the output of a laser interferometer. We have proposed a displacement measurement system which has no cyclic errors and a real-time refractive index change measurement system using tunable lasers. In this report, we will show the result of compensation for displacement measurement using above proposed systems.

Journal

Details 詳細情報について

  • CRID
    1390001205652774528
  • NII Article ID
    130004658526
  • DOI
    10.11522/pscjspe.2008a.0.231.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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