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Development of laser interferometer with picometer resolution using frequency tunable laser
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- Ishige Masashi
- Nagaoka university of technology
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- Hoshino Yuuta
- Nagaoka university of technology
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- Banh Quoc Tuan
- Nagaoka university of technology
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- Yashiki Takuya
- Nagaoka university of technology
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- Aketagawa Masato
- Nagaoka university of technology
Bibliographic Information
- Other Title
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- 周波数可変レーザを用いたピコメートル干渉測長法の開発
- The 6th report Air refractive index fluctuation compensation for displace measuremet
- 第六報 周波数可変レーザを用いた変位計測の屈折率変動補償
Description
Laser interferometer for lenght or displacement measurement widely used in the precision engineering field. A cyclic error and an influence of air refractive index fluctuation are included in the output of a laser interferometer. We have proposed a displacement measurement system which has no cyclic errors and a real-time refractive index change measurement system using tunable lasers. In this report, we will show the result of compensation for displacement measurement using above proposed systems.
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2008A (0), 231-232, 2008
The Japan Society for Precision Engineering
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Details 詳細情報について
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- CRID
- 1390001205652774528
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- NII Article ID
- 130004658526
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed
