Evaluation of error propagation in profile measurement by using stitching method

DOI

Bibliographic Information

Other Title
  • ステッチング法を用いた形状測定における誤差伝播の検証

Abstract

Stitching is a technique which enables longer measurement range of profile from several measured profiles having partly overlapped measurement range. We have been studying error propagation toward profile obtained through stitching. Here, error propagation toward profile obtained through stitching, which is analytically estimated considering error propagating model, and deviation of stitched profiles obtained from measured profiles by straightness measurement system were compared in order to evaluate the estimation.

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Keywords

Details 詳細情報について

  • CRID
    1390001205652950016
  • NII Article ID
    130004658019
  • DOI
    10.11522/pscjspe.2006a.0.193.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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