Microbial Cell Detection in CMP Slurry with Fluorescent Staining Filter Method

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  • 蛍光染色フィルター法によるＣＭＰスラリーの微生物検出方法の検討

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As structural miniaturization of CMP slurry, the microbial cell detection in CMP slurry is important for the stability of the semi-conductor production process. One of the conventional methods, culture method (CM) was used for the microbial cell contamination monitoring, but CM can count colonies on an appropriate agar plate after long time culture (from 2 to 7 days). And also the difficulty of operational performance is problem. Consequently, the rapid method is required. 'Rapid' implies non-culture method (NCMs). We have developed an automated microbial cell counting system with fluorescent staining method and the microbial cell contamination in CMP slurry was evaluated with this method. It is expected that the NCM will be used for the cleanliness monitoring in CMP slurry.

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